Inventor

COUMOU DAVID J

US44 patents

⚠️ This page may combine multiple inventors who share the name “COUMOU DAVID J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

COUMOU DAVID J

MKS INSTR INC

Phase and frequency control of a radio frequency generator from an external source

Adaptive counter measure control thwarting IMD jamming impairments for RF plasma systems

Distortion correction based feedforward control systems and methods for radio frequency power sources

Multipoint voltage and current probe system

Radio frequency power control system

Feedback control and coherency of multiple power supplies in radio frequency power delivery systems for pulsed mode schemes in thin film processing

Pulse synchronization by monitoring power in another frequency band

Unified RF power delivery single input, multiple output control for continuous and pulse mode operation

Multiple radio frequency power supply control of frequency and phase

RF metrology characterization for field installation and serviceability for the plasma processing industry

Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning network

Synchronization of RF pulsing with RF metrology, processing, and control

Power distortion-based servo control systems for frequency tuning RF power sources

Phase and frequency control of a radio frequency generator from an external source

Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events

Feedback control by RF waveform tailoring for ion energy distribution

Supervisory control of radio frequency (RF) impedance tuning operation

Orthogonal radio frequency voltage/current sensor with high dynamic range

Impedance matching network model based correction scheme and performance repeatability

Feedback control by RF waveform tailoring for ion energy distribution

Supervisory control of radio frequency (RF) impedance tuning operation

Adaptive control for a power generator

Adaptive control for a power generator

Balancing RF circuit and control for a cross-coupled SIMO distribution network

On the enhancements of planar based RF sensor technology

COUMOU DAVID J

Phase and frequency control of a radio frequency generator from an external source

Phase and frequency control of a radio frequency generator from an external source

Power distortion-based servo control systems for frequency tuning RF power sources

Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events

Frequency interference detection and correction

Feedback control and coherency of multiple power supplies in radio frequency power delivery systems for pulsed mode schemes in thin film processing

Arc detection

Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events

Frequency interference detection and correction

ENI TECHNOLOGY INC

Broadband design of a probe analysis system

Multirate processing for metrology of plasma RF source

Method and apparatus for radio frequency (RF) metrology

Adaptive plasma characterization system

RF power probe head with a thermally conductive bushing

APPLIED MATERIALS INC

Vapor concentration sensors for process chambers

Plasma resistant arc preventative coatings for manufacturing equipment components

CHOUEIRY RAY

Multipoint voltage and current probe system

TOKYO ELECTRON LTD

Method for ion mass separation and ion energy control in process plasmas

RADOMSKI AARON T

High reliability RF generator architecture