Inventor
ELNER YURIY
US6 patents
Patents
6 patentsUS10395895B2Aug 27, 2019
Feedback control by RF waveform tailoring for ion energy distribution
MKS INSTR INC6 citations82
US9876476B2Jan 23, 2018
Supervisory control of radio frequency (RF) impedance tuning operation
MKS INSTR INC7 citations82
US10692698B2Jun 23, 2020
Feedback control by RF waveform tailoring for ion energy distribution
MKS INSTR INC2 citations71
US10666206B2May 26, 2020
Supervisory control of radio frequency (RF) impedance tuning operation
MKS INSTR INC2 citations71
US11531312B2Dec 20, 2022
Adaptive control for a power generator
MKS INSTR INC5 citations70
US11042140B2Jun 22, 2021
Adaptive control for a power generator
MKS INSTR INC3 citations70