Inventor
HANSEN ERIKA
US6 patents
Patents
6 patentsUS11959169B2Apr 16, 2024
Asymmetric injection for better wafer uniformity
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Asymmetric injection for better wafer uniformity
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US11322347B2May 3, 2022
Conformal oxidation processes for 3D NAND
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US11081340B2Aug 3, 2021
Argon addition to remote plasma oxidation
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US10636650B2Apr 28, 2020
Argon addition to remote plasma oxidation
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US12139790B2Nov 12, 2024
Processing system and method of delivering a reactant gas
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