Inventor
CHAO SHU-HAN
TW4 patents
Patents
4 patentsUS12466727B2Nov 11, 2025
Extended acid etch for oxide removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11655146B2May 23, 2023
Extended acid etch for oxide removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US10930527B2Feb 23, 2021
Method for controlling temperature of furnace in semiconductor fabrication process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US10741426B2Aug 11, 2020
Method for controlling temperature of furnace in semiconductor fabrication process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45