Inventor
WANG YI-REN
TW15 patents
⚠️ This page may combine multiple inventors who share the name “WANG YI-REN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
12 patentsUS12185631B2Dec 31, 2024
Pizoelectric MEMS device with electrodes having low surface roughness
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US11812664B2Nov 7, 2023
Pizoelectric MEMS device with electrodes having low surface roughness
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11198606B2Dec 14, 2021
Structure for microelectromechanical systems (MEMS) devices to control pressure at high temperature
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11050012B2Jun 29, 2021
Method to protect electrodes from oxidation in a MEMS device
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US12334333B2Jun 17, 2025
Methods for patterning a silicon oxide-silicon nitride-silicon oxide stack and structures formed by the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12151932B2Nov 26, 2024
Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12134824B2Nov 5, 2024
Undercut-free patterned aluminum nitride structure and methods for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11814283B2Nov 14, 2023
Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11697588B2Jul 11, 2023
Structure for microelectromechanical systems (MEMS) devices to control pressure at high temperature
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11521846B2Dec 6, 2022
Methods for patterning a silicon oxide-silicon nitride-silicon oxide stack and structures formed by the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11371133B2Jun 28, 2022
Undercut-free patterned aluminum nitride structure and methods for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11040870B2Jun 22, 2021
Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62