Inventor
SHOUJI Minami
JP9 patents
Patents
9 patentsUS11355308B2Jun 7, 2022
Charged particle beam device
HITACHI HIGH TECH CORP2 citations72
US11393657B2Jul 19, 2022
Electron beam device
HITACHI HIGH TECH CORP2 citations71
US9812288B2Nov 7, 2017
Sample holder with light emitting and transferring elements for a charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations71
US10134564B2Nov 20, 2018
Charged particle beam device
HITACHI HIGH TECH CORP3 citations68
US11631568B2Apr 18, 2023
Device defect detection method using a charged particle beam
HITACHI HIGH TECH CORP0 citations62
US11328897B2May 10, 2022
Charged particle beam device
HITACHI HIGH TECH CORP1 citations61
US12196802B2Jan 14, 2025
Semiconductor inspection device and method for inspecting semiconductor sample
HITACHI HIGH TECH CORP0 citations51
US11869745B2Jan 9, 2024
Charged particle beam device
HITACHI HIGH TECH CORP0 citations51
US12573586B2Mar 10, 2026
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations48