Inventor

VANDERHALLEN IVO

NL5 patents

⚠️ This page may combine multiple inventors who share the name “VANDERHALLEN IVO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US9983482B2May 29, 2018

VAN SCHOOT JAN BERNARD PLECHELMUS

1 patent

US9632419B2Apr 25, 2017

Radiation source

VAN SCHOOT JAN BERNARD PLECHELMUS2 citations68

TEGENBOSCH HENRICUS GERARDUS

1 patent

US9335641B2May 10, 2016

Optical element mount for lithographic apparatus

TEGENBOSCH HENRICUS GERARDUS1 citations42

VANDERHALLEN IVO

ASML NETHERLANDS BV

Radiation collector, radiation source and lithographic apparatus

Connection assembly

Radiation conduit

VAN SCHOOT JAN BERNARD PLECHELMUS

Radiation source

TEGENBOSCH HENRICUS GERARDUS

Optical element mount for lithographic apparatus