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Inventor
FUMOTO MASASHI
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “FUMOTO MASASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEL SAGAMI LTD
1 patent
US5030057A
Jul 9, 1991
Semiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor wafer
TEL SAGAMI LTD
41 citations
90
FUMOTO MASASHI
1 patent
US8147141B2
Apr 3, 2012
Linear motion guide unit
FUMOTO MASASHI
7 citations
71