Inventor
HAYASHIDA MASAMI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “HAYASHIDA MASAMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
10 patentsUS5641593AJun 24, 1997
Lithographic mask and exposure apparatus using the same
CANON KK106 citations97
US5052033ASep 24, 1991
Reflection type mask
CANON KK75 citations96
US5390228AFeb 14, 1995
Method of and apparatus for stabilizing shapes of objects, such as optical elements, as well as exposure apparatus using same and method of manufacturing semiconductor devices
CANON KK90 citations95
US5848119ADec 8, 1998
Illumination system and exposure apparatus having the same
CANON KK43 citations92
US5549994AAug 27, 1996
Exposure apparatus and reflection type mask to be used in the same
CANON KK25 citations92
US5461657AOct 24, 1995
X-ray mirror, and x-ray exposure apparatus and device manufacturing method employing the same
CANON KK24 citations92
US5204887AApr 20, 1993
X-ray microscope
CANON KK49 citations92
US5444753AAug 22, 1995
X-ray lithography mask, light exposure apparatus and process therefore
CANON KK14 citations73
US5335259AAug 2, 1994
X-ray exposure apparatus
CANON KK13 citations73
US5145649ASep 8, 1992
Apparatus for cleaning an optical element for use with a radiation beam
CANON KK2 citations62