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Inventor
CHARIF MALEK
US
4 patents
⚠️ This page may combine multiple inventors who share the name “CHARIF MALEK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PRI AUTOMATION INC
2 patents
US6623235B2
Sep 23, 2003
Robot arm edge gripping device for handling substrates using two four-bar linkages
PRI AUTOMATION INC
42 citations
87
US6913302B2
Jul 5, 2005
Robot arm edge gripping device for handling substrates
PRI AUTOMATION INC
17 citations
78
MITSUBISHI MATERIALS CORP
1 patent
US6368189B1
Apr 9, 2002
Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure
MITSUBISHI MATERIALS CORP
75 citations
94
INTEGRATED PROCESS EQUIPMENT C
1 patent
US5851140A
Dec 22, 1998
Semiconductor wafer polishing apparatus with a flexible carrier plate
INTEGRATED PROCESS EQUIPMENT C
241 citations
94