Inventor
KUBO TAKUYA
JP22 patents
⚠️ This page may combine multiple inventors who share the name “KUBO TAKUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS7109660B2Sep 19, 2006
Plasma processing device and baffle plate thereof
TOKYO ELECTRON LTD19 citations83
US10403814B2Sep 3, 2019
Method of cleaning and method of plasma processing
TOKYO ELECTRON LTD2 citations71
US11832524B2Nov 28, 2023
Method for processing substrate, processing apparatus, and processing system
TOKYO ELECTRON LTD0 citations60
US10944051B2Mar 9, 2021
Method of cleaning a substrate processing apparatus and the substrate processing apparatus performing the method
TOKYO ELECTRON LTD1 citations60
US12336436B2Jun 17, 2025
Etching method
TOKYO ELECTRON LTD0 citations51
US11171286B2Nov 9, 2021
Method of processing workpiece
TOKYO ELECTRON LTD0 citations50
US11152564B2Oct 19, 2021
Substrate manufacturing method and processing system
TOKYO ELECTRON LTD0 citations50
US10790152B2Sep 29, 2020
Method for etching multilayer film
TOKYO ELECTRON LTD0 citations40
US10181559B2Jan 15, 2019
Etching method
TOKYO ELECTRON LTD0 citations39
SYSMEX CORP
6 patentsUS10604731B2Mar 31, 2020
Cell analyzer, cell analyzer controlling method, and program
SYSMEX CORP2 citations71
US10809249B2Oct 20, 2020
Method for measuring cholesterol uptake capacity of lipoproteins
SYSMEX CORP2 citations68
US11473130B2Oct 18, 2022
Sample analyzing method and sample analyzer
SYSMEX CORP0 citations61
US10676784B2Jun 9, 2020
Sample analyzing method and sample analyzer
SYSMEX CORP1 citations61
US11486875B2Nov 1, 2022
Method for measuring cholesterol uptake capacity of lipoproteins
SYSMEX CORP1 citations58
US12281092B2Apr 22, 2025
Compound or salt thereof, composition, chemiluminescence method, method for measuring chemiluminescence signal, reagent, reagent kit, and method for assaying analyte
SYSMEX CORP0 citations43