Inventor
DIPIETRO CHRISTIAN
US4 patents
Patents
4 patentsUS7383843B2Jun 10, 2008
Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer
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US9831110B2Nov 28, 2017
Vision-based wafer notch position measurement
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US6666755B1Dec 23, 2003
Belt wiper for a chemical mechanical planarization system
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US7534307B2May 19, 2009
Methods for processing wafer surfaces using thin, high velocity fluid layer
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