Inventor
CHEN TONG QING
SG9 patents
⚠️ This page may combine multiple inventors who share the name “CHEN TONG QING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
4 patentsUS6884712B2Apr 26, 2005
Method of manufacturing semiconductor local interconnect and contact
CHARTERED SEMICONDUCTOR MFG233 citations94
US7524755B2Apr 28, 2009
Entire encapsulation of Cu interconnects using self-aligned CuSiN film
CHARTERED SEMICONDUCTOR MFG37 citations91
US7803704B2Sep 28, 2010
Reliable interconnects
CHARTERED SEMICONDUCTOR MFG6 citations72
US7119005B2Oct 10, 2006
Semiconductor local interconnect and contact
CHARTERED SEMICONDUCTOR MFG2 citations59
SAMSUNG ELECTRONICS CO LTD
2 patentsUS7488687B2Feb 10, 2009
Methods of forming electrical interconnect structures using polymer residues to increase etching selectivity through dielectric layers
SAMSUNG ELECTRONICS CO LTD7 citations73
US7553758B2Jun 30, 2009
Method of fabricating interconnections of microelectronic device using dual damascene process
SAMSUNG ELECTRONICS CO LTD7 citations70