Inventor
DOSTALIK WILLIAM W
US5 patents
Patents
5 patentsUS6984580B2Jan 10, 2006
Dual damascene pattern liner
TEXAS INSTRUMENTS INC29 citations91
US8008200B2Aug 30, 2011
Poison-free and low ULK damage integration scheme for damascene interconnects
TEXAS INSTRUMENTS INC6 citations73
US5268067ADec 7, 1993
Wafer clamping method
TEXAS INSTRUMENTS INC12 citations72
US7884019B2Feb 8, 2011
Poison-free and low ULK damage integration scheme for damascene interconnects
TEXAS INSTRUMENTS INC5 citations62
US7067435B2Jun 27, 2006
Method for etch-stop layer etching during damascene dielectric etching with low polymerization
TEXAS INSTRUMENTS INC6 citations59