Inventor

SATO NORIKATSU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SATO NORIKATSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US6593045B2Jul 15, 2003

Substrate processing apparatus and method

TOKYO ELECTRON LTD38 citations90

DAIDO STEEL CO LTD

1 patent

US4631169ADec 23, 1986

Alloys for exhaust valves

DAIDO STEEL CO LTD13 citations71

SATO NORIKATSU

1 patent

US8440266B2May 14, 2013

Developing device, developing method and storage medium

SATO NORIKATSU1 citations42