P

Inventor

MATSUMURA YUSHI

JP7 patents
⚠️ This page may combine multiple inventors who share the name “MATSUMURA YUSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JSR CORP

4 patents
US8871432B2Oct 28, 2014

Pattern-forming method, resist underlayer film, and composition for forming resist underlayer film

JSR CORP4 citations71
US8859185B2Oct 14, 2014

Resist underlayer film-forming composition

JSR CORP2 citations60
US9046769B2Jun 2, 2015

Pattern-forming method, and composition for forming resist underlayer film

JSR CORP0 citations49
US9329478B2May 3, 2016

Polysiloxane composition and pattern-forming method

JSR CORP0 citations39

MINEGISHI SHIN-YA

2 patents
US8513133B2Aug 20, 2013

Composition for forming resist underlayer film and method for forming pattern

MINEGISHI SHIN-YA9 citations81
US9029069B2May 12, 2015

Resist underlayer film-forming composition and method for forming pattern

MINEGISHI SHIN-YA0 citations38

MATSUMURA YUSHI

1 patent
US8859191B2Oct 14, 2014

Pattern-forming method, and composition for forming resist underlayer film

MATSUMURA YUSHI4 citations65