P

Inventor

NAKAFUJI SHINYA

JP7 patents
⚠️ This page may combine multiple inventors who share the name “NAKAFUJI SHINYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JSR CORP

4 patents
US9607849B2Mar 28, 2017

Pattern-forming method and resist underlayer film-forming composition

JSR CORP2 citations70
US8859185B2Oct 14, 2014

Resist underlayer film-forming composition

JSR CORP2 citations60
US9182671B2Nov 10, 2015

Method for forming pattern, and composition for forming resist underlayer film

JSR CORP1 citations51
US9046769B2Jun 2, 2015

Pattern-forming method, and composition for forming resist underlayer film

JSR CORP0 citations49

MINEGISHI SHIN-YA

2 patents
US8513133B2Aug 20, 2013

Composition for forming resist underlayer film and method for forming pattern

MINEGISHI SHIN-YA9 citations81
US9029069B2May 12, 2015

Resist underlayer film-forming composition and method for forming pattern

MINEGISHI SHIN-YA0 citations38

MATSUMURA YUSHI

1 patent
US8859191B2Oct 14, 2014

Pattern-forming method, and composition for forming resist underlayer film

MATSUMURA YUSHI4 citations65