Inventor

KOMURA KAZUHIKO

JP7 patents

⚠️ This page may combine multiple inventors who share the name “KOMURA KAZUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JSR CORP

4 patents

US8871432B2Oct 28, 2014

Pattern-forming method, resist underlayer film, and composition for forming resist underlayer film

JSR CORP4 citations71

US9170493B2Oct 27, 2015

Resist underlayer film-forming composition, pattern-forming method and resist underlayer film

JSR CORP3 citations61

US8859185B2Oct 14, 2014

Resist underlayer film-forming composition

JSR CORP2 citations60

US9046769B2Jun 2, 2015

Pattern-forming method, and composition for forming resist underlayer film

JSR CORP0 citations49

MINEGISHI SHIN-YA

2 patents

US8513133B2Aug 20, 2013

Composition for forming resist underlayer film and method for forming pattern

MINEGISHI SHIN-YA9 citations81

US9029069B2May 12, 2015

Resist underlayer film-forming composition and method for forming pattern

MINEGISHI SHIN-YA0 citations38

MATSUMURA YUSHI

1 patent

US8859191B2Oct 14, 2014

Pattern-forming method, and composition for forming resist underlayer film

MATSUMURA YUSHI4 citations65