Inventor

HOLLAND KAREY

US4 patents

⚠️ This page may combine multiple inventors who share the name “HOLLAND KAREY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KERPRICH ROBERT

2 patents

US9180570B2Nov 10, 2015

Grooved CMP pad

KERPRICH ROBERT18 citations90

US9375823B2Jun 28, 2016

Grooved CMP pads

KERPRICH ROBERT1 citations50

SPEEDFAM IPEC

1 patent

US6261158B1Jul 17, 2001

Multi-step chemical mechanical polishing

SPEEDFAM IPEC57 citations90

FEI CO

1 patent

US9696372B2Jul 4, 2017

Multidimensional structural access

FEI CO1 citations51