Inventor
SHIN CHANG-HUN
KR3 patents
⚠️ This page may combine multiple inventors who share the name “SHIN CHANG-HUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EUGENE TECHNOLOGY CO LTD
2 patentsUS9312125B2Apr 12, 2016
Cyclic deposition method for thin film formation, semiconductor manufacturing method, and semiconductor device
EUGENE TECHNOLOGY CO LTD0 citations46
US9818604B2Nov 14, 2017
Method for depositing insulating film on recessed portion having high aspect ratio
EUGENE TECHNOLOGY CO LTD1 citations42