Inventor

KIM SEOK-YUN

KR3 patents

Patents

3 patents

US9312125B2Apr 12, 2016

Cyclic deposition method for thin film formation, semiconductor manufacturing method, and semiconductor device

EUGENE TECHNOLOGY CO LTD0 citations46

US9818604B2Nov 14, 2017

Method for depositing insulating film on recessed portion having high aspect ratio

EUGENE TECHNOLOGY CO LTD1 citations42

US9741574B2Aug 22, 2017

Cyclic deposition method for thin film and manufacturing method for semiconductor, and semiconductor device

EUGENE TECHNOLOGY CO LTD0 citations35