Inventor
WANG SHENG-MIN
TW11 patents
⚠️ This page may combine multiple inventors who share the name “WANG SHENG-MIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS12189284B2Jan 7, 2025
Method for forming semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12416864B2Sep 16, 2025
Tool mismatch reduction using aberration map of the tools
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12386251B2Aug 12, 2025
Method and system to introduce bright field imaging at stitching area of high-NA EUV exposure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US12321099B2Jun 3, 2025
Method for generating EUV radiation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51