Inventor
SOGA AKIRA
JP7 patents
Patents
7 patentsUS6541287B2Apr 1, 2003
Temperature measuring method and apparatus, measuring method for the thickness of the formed film, measuring apparatus for the thickness of the formed film thermometer for wafers
TOSHIBA KK24 citations89
US6780657B2Aug 24, 2004
Temperature measuring method and apparatus, measuring method for the thickness of the formed film, measuring apparatus for the thickness of the formed film thermometer for wafers
TOSHIBA KK14 citations80
US10387532B2Aug 20, 2019
Manufacturing control system, manufacturing control method, and manufacturing control program
TOSHIBA KK5 citations69
US8019456B2Sep 13, 2011
Product repair support system, product manufacturing system, and product manufacturing method
TOSHIBA KK3 citations59
US9760085B2Sep 12, 2017
Production support system, production support method, and production support program
TOSHIBA KK0 citations39
US10001774B2Jun 19, 2018
Manufacturing supporting system, manufacturing supporting method, and manufacturing supporting program for electronic device
TOSHIBA KK0 citations37
US10853538B2Dec 1, 2020
Model generation system and model generation method
TOSHIBA KK0 citations29