Inventor

MAASSEN MARTINUS GERARDUS MARIA JOHANNES

US3 patents

Patents

3 patents

US10884342B2Jan 5, 2021

Method and apparatus for predicting performance of a metrology system

ASML NETHERLANDS BV2 citations69

US11798777B2Oct 24, 2023

Charged particle beam apparatus, and systems and methods for operating the apparatus

ASML NETHERLANDS BV0 citations59

US12165837B2Dec 10, 2024

System and method for scanning a sample using multi-beam inspection apparatus

ASML NETHERLANDS BV0 citations58