Inventor
FUJITANI YOSHIYUKI
JP3 patents
⚠️ This page may combine multiple inventors who share the name “FUJITANI YOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
2 patentsUS11094564B2Aug 17, 2021
Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method
SCREEN HOLDINGS CO LTD0 citations41
US10816141B2Oct 27, 2020
Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate
SCREEN HOLDINGS CO LTD0 citations37