Inventor · disambiguated record

Masako Mano

Also filed as: Mano Masako

1 granted patent·0 citations·filing 2018–2018

5Inventor score

Technology areasH10P

Files withSCREEN HOLDINGS CO LTD1

Top patents by PatentIndex Score

1 record

0136US11094564B2Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Aug 17, 2021·0 cites·22 claims

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