Inventor
DIGHE PRASANNA
US7 patents
⚠️ This page may combine multiple inventors who share the name “DIGHE PRASANNA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS9087176B1Jul 21, 2015
Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control
KLA TENCOR CORP57 citations95
US11164768B2Nov 2, 2021
Process-induced displacement characterization during semiconductor production
KLA TENCOR CORP6 citations83
US10545412B2Jan 28, 2020
Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control
KLA TENCOR CORP2 citations71
US11441893B2Sep 13, 2022
Multi-spot analysis system with multiple optical probes
KLA TENCOR CORP0 citations48