Inventor
PATIL RAVIKUMAR
IN10 patents
⚠️ This page may combine multiple inventors who share the name “PATIL RAVIKUMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS11699571B2Jul 11, 2023
Semiconductor processing chambers for deposition and etch
APPLIED MATERIALS INC2 citations69
US10679827B2Jun 9, 2020
Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity
APPLIED MATERIALS INC3 citations64
US11940819B1Mar 26, 2024
Mass flow controller based fast gas exchange
APPLIED MATERIALS INC2 citations63
US11881375B2Jan 23, 2024
Common substrate and shadow ring lift apparatus
APPLIED MATERIALS INC0 citations60
US11887811B2Jan 30, 2024
Semiconductor processing chambers for deposition and etch
APPLIED MATERIALS INC1 citations59
US12456602B2Oct 28, 2025
Semiconductor processing chambers and methods for deposition and etch
APPLIED MATERIALS INC0 citations58
US11887884B2Jan 30, 2024
Pre-loaded bowl mechanism for providing a symmetric radio frequency return path
APPLIED MATERIALS INC0 citations50
US12400833B2Aug 26, 2025
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations48
US11664247B2May 30, 2023
Dynamic interface for providing a symmetric radio frequency return path
APPLIED MATERIALS INC0 citations48