Inventor
GE JHIH KUEI
TW6 patents
Patents
6 patentsUS12110435B2Oct 8, 2024
Etching composition and method for selectively removing silicon nitride during manufacture of a semiconductor device
VERSUM MAT US LLC3 citations72
US12281251B2Apr 22, 2025
Etching composition and method for selectively removing silicon nitride during manufacture of a semiconductor device
VERSUM MAT US LLC0 citations60
US11955341B2Apr 9, 2024
Etching solution and method for selectively removing silicon nitride during manufacture of a semiconductor device
VERSUM MAT US LLC0 citations60
US11499236B2Nov 15, 2022
Etching solution for tungsten word line recess
VERSUM MAT US LLC1 citations60
US10954480B2Mar 23, 2021
Compositions and methods for preventing collapse of high aspect ratio structures during drying
VERSUM MAT US LLC0 citations57
US11175587B2Nov 16, 2021
Stripper solutions and methods of using stripper solutions
VERSUM MAT US LLC1 citations56