Inventor
SUN LAISHENG
US8 patents
⚠️ This page may combine multiple inventors who share the name “SUN LAISHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VERSUM MAT US LLC
6 patentsUS12110435B2Oct 8, 2024
Etching composition and method for selectively removing silicon nitride during manufacture of a semiconductor device
VERSUM MAT US LLC3 citations72
US12298669B2May 13, 2025
Composition comprising three alkanolamines and a hydroxylamine for removing etch residues
VERSUM MAT US LLC0 citations62
US11091727B2Aug 17, 2021
Post etch residue cleaning compositions and methods of using the same
VERSUM MAT US LLC0 citations61
US12281251B2Apr 22, 2025
Etching composition and method for selectively removing silicon nitride during manufacture of a semiconductor device
VERSUM MAT US LLC0 citations60
US11035044B2Jun 15, 2021
Etching solution for tungsten and GST films
VERSUM MAT US LLC1 citations60
US12325844B2Jun 10, 2025
Photoresist remover
VERSUM MAT US LLC0 citations59