Inventor
DINH THUC M
US11 patents
⚠️ This page may combine multiple inventors who share the name “DINH THUC M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LIU BENJAMIN Y H
5 patentsUS8711338B2Apr 29, 2014
Apparatus for counting particles in a gas
LIU BENJAMIN Y H550 citations96
US8465791B2Jun 18, 2013
Method for counting particles in a gas
LIU BENJAMIN Y H21 citations90
US8511583B2Aug 20, 2013
Fine droplet atomizer for liquid precursor vaporization
LIU BENJAMIN Y H5 citations83
US9089800B2Jul 28, 2015
Method and apparatus for vapor and gas filtration
LIU BENJAMIN Y H0 citations51
US8728240B2May 20, 2014
Apparatus for vapor condensation and recovery
LIU BENJAMIN Y H0 citations40
MSP CORP
5 patentsUS8603247B2Dec 10, 2013
Apparatus for counting particles in a gas
MSP CORP8 citations82
US8986784B2Mar 24, 2015
Fine droplet atomization for liquid precursor vaporization
MSP CORP0 citations51
US8945281B1Feb 3, 2015
Method and apparatus for vapor generation and wafer cleaning
MSP CORP1 citations51
US10287679B2May 14, 2019
Apparatus and method for vapor generation and film deposition
MSP CORP0 citations41
US9797593B2Oct 24, 2017
Apparatus and method for vapor generation and film deposition
MSP CORP0 citations41