Inventor

MA YAMIN

US14 patents

⚠️ This page may combine multiple inventors who share the name “MA YAMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MSP CORP

4 patents

US8986784B2Mar 24, 2015

Fine droplet atomization for liquid precursor vaporization

MSP CORP0 citations51

US8945281B1Feb 3, 2015

Method and apparatus for vapor generation and wafer cleaning

MSP CORP1 citations51

US10287679B2May 14, 2019

Apparatus and method for vapor generation and film deposition

MSP CORP0 citations41

US9797593B2Oct 24, 2017

Apparatus and method for vapor generation and film deposition

MSP CORP0 citations41

GRACO INC

3 patents

US5647543AJul 15, 1997

Electrostatic ionizing system

GRACO INC38 citations91

US5364035ANov 15, 1994

High voltage sealing and isolation via dynamic seals

GRACO INC25 citations91

US5346134ASep 13, 1994

CO2 -assisted spray gun and nozzle

GRACO INC10 citations70

LIU BENJAMIN Y H

3 patents

US8511583B2Aug 20, 2013

Fine droplet atomizer for liquid precursor vaporization

LIU BENJAMIN Y H5 citations83

US9089800B2Jul 28, 2015

Method and apparatus for vapor and gas filtration

LIU BENJAMIN Y H0 citations51

US8728240B2May 20, 2014

Apparatus for vapor condensation and recovery

LIU BENJAMIN Y H0 citations40

DINH THUC M

1 patent

US8783652B2Jul 22, 2014

Liquid flow control for film deposition

DINH THUC M9 citations79

LIU BENJAMIN

1 patent

US8297223B2Oct 30, 2012

Method and apparatus for particle filtration and enhancing tool performance in film deposition

LIU BENJAMIN15 citations79

DINH THUC

1 patent

US8554064B1Oct 8, 2013

Method and apparatus for generating vapor at high rates

DINH THUC17 citations77

GRACO MINNESOTA INC

1 patent

US6293157B1Sep 25, 2001

Compensation of coriolis meter motion induced signal

GRACO MINNESOTA INC3 citations62