Inventor
SAWIN HERBERT H
US11 patents
⚠️ This page may combine multiple inventors who share the name “SAWIN HERBERT H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MASSACHUSETTS INST TECHNOLOGY
8 patentsUS6156435ADec 5, 2000
Chemical vapor deposition of fluorocarbon polymer thin films
MASSACHUSETTS INST TECHNOLOGY187 citations98
US5888591AMar 30, 1999
Chemical vapor deposition of fluorocarbon polymer thin films
MASSACHUSETTS INST TECHNOLOGY245 citations98
US5450205ASep 12, 1995
Apparatus and method for real-time measurement of thin film layer thickness and changes thereof
MASSACHUSETTS INST TECHNOLOGY319 citations98
US6740247B1May 25, 2004
HF vapor phase wafer cleaning and oxide etching
MASSACHUSETTS INST TECHNOLOGY215 citations97
US5061838AOct 29, 1991
Toroidal electron cyclotron resonance reactor
MASSACHUSETTS INST TECHNOLOGY360 citations97
US6153115ANov 28, 2000
Monitor of plasma processes with multivariate statistical analysis of plasma emission spectra
MASSACHUSETTS INST TECHNOLOGY120 citations95
US6153269ANov 28, 2000
Chemical vapor deposition of fluorocarbon polymer thin films
MASSACHUSETTS INST TECHNOLOGY82 citations95
US6083413AJul 4, 2000
Metals removal process
MASSACHUSETTS INST TECHNOLOGY41 citations91