Inventor
SMATLAK DONNA L
US9 patents
⚠️ This page may combine multiple inventors who share the name “SMATLAK DONNA L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
6 patentsUS6791094B1Sep 14, 2004
Method and apparatus for determining beam parallelism and direction
VARIAN SEMICONDUCTOR EQUIPMENT63 citations95
US7166854B2Jan 23, 2007
Uniformity control multiple tilt axes, rotating wafer and variable scan velocity
VARIAN SEMICONDUCTOR EQUIPMENT17 citations84
US7655922B2Feb 2, 2010
Techniques for confining electrons in an ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT9 citations82
US7459704B2Dec 2, 2008
Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms
VARIAN SEMICONDUCTOR EQUIPMENT17 citations82
US7161161B2Jan 9, 2007
Uniformity control using multiple fixed wafer orientations and variable scan velocity
VARIAN SEMICONDUCTOR EQUIPMENT7 citations74
US7402816B2Jul 22, 2008
Electron injection in ion implanter magnets
VARIAN SEMICONDUCTOR EQUIPMENT7 citations71