Inventor
PRENGLE SCOTT H
US6 patents
Patents
6 patentsUS5454906AOct 3, 1995
Method of providing sacrificial spacer for micro-mechanical devices
TEXAS INSTRUMENTS INC324 citations98
US5567334AOct 22, 1996
Method for creating a digital micromirror device using an aluminum hard mask
TEXAS INSTRUMENTS INC303 citations95
US6607985B1Aug 19, 2003
Gate stack and etch process
TEXAS INSTRUMENTS INC22 citations92
US5171702ADec 15, 1992
Method for forming a thick base oxide in a BiCMOS process
TEXAS INSTRUMENTS INC27 citations92
US6191457B1Feb 20, 2001
Integrated circuit structure having a bipolar transistor with a thick base oxide and a field effect transistor with a thin gate oxide
TEXAS INSTRUMENTS INC9 citations73
US5910676AJun 8, 1999
Method for forming a thick base oxide in a BiCMOS process
TEXAS INSTRUMENTS INC13 citations73