Inventor
STOWELL R MARSHALL
US16 patents
⚠️ This page may combine multiple inventors who share the name “STOWELL R MARSHALL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
11 patentsUS6964792B1Nov 15, 2005
Methods and apparatus for controlling electrolyte flow for uniform plating
NOVELLUS SYSTEMS INC121 citations98
US6800187B1Oct 5, 2004
Clamshell apparatus for electrochemically treating wafers
NOVELLUS SYSTEMS INC168 citations97
US7605082B1Oct 20, 2009
Capping before barrier-removal IC fabrication method
NOVELLUS SYSTEMS INC36 citations96
US8043958B1Oct 25, 2011
Capping before barrier-removal IC fabrication method
NOVELLUS SYSTEMS INC26 citations92
US7811925B1Oct 12, 2010
Capping before barrier-removal IC fabrication method
NOVELLUS SYSTEMS INC16 citations92
US6126382AOct 3, 2000
Apparatus for aligning substrate to chuck in processing chamber
NOVELLUS SYSTEMS INC71 citations91
US7690324B1Apr 6, 2010
Small-volume electroless plating cell
NOVELLUS SYSTEMS INC21 citations90
US6815349B1Nov 9, 2004
Electroless copper deposition apparatus
NOVELLUS SYSTEMS INC34 citations90
US9677188B2Jun 13, 2017
Electrofill vacuum plating cell
NOVELLUS SYSTEMS INC8 citations84
US10351968B2Jul 16, 2019
Front referenced anode
NOVELLUS SYSTEMS INC1 citations72
US9340893B2May 17, 2016
Front referenced anode
NOVELLUS SYSTEMS INC2 citations62