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Inventor
NISHIOKA KENICHI
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “NISHIOKA KENICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patents
US5779796A
Jul 14, 1998
Resist processing method and apparatus
TOKYO ELECTRON LTD
95 citations
96
US5626913A
May 6, 1997
Resist processing method and apparatus
TOKYO ELECTRON LTD
67 citations
94
US5759614A
Jun 2, 1998
Resist processing method and apparatus
TOKYO ELECTRON LTD
5 citations
72
SUMCO CORP
1 patent
US12546029B2
Feb 10, 2026
System and method for producing single crystal
SUMCO CORP
0 citations
50