Inventor

CHIU EDDIE

US7 patents

⚠️ This page may combine multiple inventors who share the name “CHIU EDDIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

2 patents

US6955177B1Oct 18, 2005

Methods for post polysilicon etch photoresist and polymer removal with minimal gate oxide loss

NOVELLUS SYSTEMS INC28 citations87

US7160813B1Jan 9, 2007

Etch back process approach in dual source plasma reactors

NOVELLUS SYSTEMS INC22 citations85

LUMENTUM OPERATIONS LLC

2 patents

US9720147B2Aug 1, 2017

Reflective diffraction grating and fabrication method

LUMENTUM OPERATIONS LLC2 citations70

US10768349B2Sep 8, 2020

Reflective diffraction grating and fabrication method

LUMENTUM OPERATIONS LLC0 citations49

LAM RES CORP

1 patent

US6121154ASep 19, 2000

Techniques for etching with a photoresist mask

LAM RES CORP19 citations88

PROMOS TECHNOLOGIES INC

1 patent

US6459151B1Oct 1, 2002

Structure and process of via chain for misalignment test

PROMOS TECHNOLOGIES INC7 citations71

PROMOS TECH INC

1 patent

US6146987ANov 14, 2000

Method for forming a contact plug over an underlying metal line using an etching stop layer

PROMOS TECH INC8 citations71