Inventor
KIKU TAIJI
JP7 patents
Patents
7 patentsUS6855576B2Feb 15, 2005
Method for cleaning a ceramic member for use in a system for producing semiconductors, a cleaning agent and a combination of cleaning agents
NGK INSULATORS LTD12 citations82
US7401399B2Jul 22, 2008
Method of manufacturing a substrate heating device
NGK INSULATORS LTD3 citations61
US7211156B2May 1, 2007
Method for cleaning a ceramic member for use in a system for producing semiconductors, a cleaning agent and a combination of cleaning agents
NGK INSULATORS LTD2 citations61
US7288020B1Oct 30, 2007
Method of blasting process
NGK INSULATORS LTD5 citations59
US7261780B2Aug 28, 2007
Ceramic susceptor and a method of cleaning the same
NGK INSULATORS LTD1 citations50
US7948516B2May 24, 2011
Position accuracy evaluation method and position accuracy evaluation apparatus
NGK INSULATORS LTD0 citations39
US7686889B2Mar 30, 2010
Susceptor for semiconductor manufacturing apparatus
NGK INSULATORS LTD0 citations39