Inventor

KOYANAGI KENICHI

JP25 patents

⚠️ This page may combine multiple inventors who share the name “KOYANAGI KENICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOYANAGI KENICHI

NEC CORP

Method of forming trench isolation structure

High density plasma enhanced chemical vapor deposition method

Method for manufacturing a multilevel interconnection structure

Semiconductor device and process for production thereof

Method of appraising a dielectric film, method of calibrating temperature of a heat treatment device, and method of fabricating a semiconductor memory device

Spin on glass material and method for forming a semiconductor device by using improved spin on glass material

Heat treatment of a tantalum oxide film

ELPIDA MEMORY INC

Method for forming a metal oxide film

Semiconductor manufacturing apparatus

Method for semiconductor device manufacturing to include multistage chemical vapor deposition of material oxide film

Process for manufacturing semiconductor device

Method for forming a metal oxide film

Method for manufacturing semiconductor storage device comprising a slow cooling step

ALD process for capacitor dielectric

INTERMOLECULAR INC

High performance dielectric stack for DRAM capacitor

High performance dielectric stack for DRAM capacitor

High performance dielectric stack for DRAM capacitor

Methods to improve electrical performance of ZrO2 based high-K dielectric materials for DRAM applications

IZUMI TETSURO

Picking system

Picking system

Robot system

MALHOTRA SANDRA

High performance dielectric stack for DRAM capacitor

Leakage reduction in DRAM MIM capacitors

HITACHI LTD

Memory with memory cells that include a MIM type capacitor with a lower electrode made for reduced resistance at an interface with a metal film

MOROZUMI YUICHIRO

Method for suppressing particle generation during semiconductor manufacturing