Inventor
HAMA KIICHI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “HAMA KIICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS5413958AMay 9, 1995
Method for manufacturing a liquid crystal display substrate
TOKYO ELECTRON LTD208 citations99
US5372836ADec 13, 1994
Method of forming polycrystalling silicon film in process of manufacturing LCD
TOKYO ELECTRON LTD163 citations99
US5529630AJun 25, 1996
Apparatus for manufacturing a liquid crystal display substrate, and apparatus for evaluating semiconductor crystals
TOKYO ELECTRON LTD122 citations98
US5525159AJun 11, 1996
Plasma process apparatus
TOKYO ELECTRON LTD194 citations98
US6089182AJul 18, 2000
Plasma processing apparatus
TOKYO ELECTRON LTD88 citations97
US5792261AAug 11, 1998
Plasma process apparatus
TOKYO ELECTRON LTD94 citations97
US5716451AFeb 10, 1998
Plasma processing apparatus
TOKYO ELECTRON LTD116 citations95
USRE36371ENov 2, 1999
Method of forming polycrystalline silicon film in process of manufacturing LCD
TOKYO ELECTRON LTD22 citations92
USRE39020EMar 21, 2006
Plasma process apparatus
TOKYO ELECTRON LTD12 citations84
US7975049B2Jul 5, 2011
Point-based customer tracking and maintenance incentive system
TOKYO ELECTRON LTD2 citations62
US7698149B2Apr 13, 2010
Point-based customer tracking and maintenance incentive system
TOKYO ELECTRON LTD3 citations62
US8032629B2Oct 4, 2011
Point-based customer tracking and maintenance incentive system
TOKYO ELECTRON LTD0 citations51