Inventor

FUKUMOTO HIROFUMI

JP6 patents

⚠️ This page may combine multiple inventors who share the name “FUKUMOTO HIROFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PANASONIC CORP

3 patents

US7474382B2Jan 6, 2009

Method for determining focus deviation amount in pattern exposure and pattern exposure method

PANASONIC CORP5 citations55

US7838185B2Nov 23, 2010

Focus measurement method and method of manufacturing a semiconductor device

PANASONIC CORP2 citations54

US7883840B2Feb 8, 2011

Developing method and method for fabricating semiconductor device using the developing method

PANASONIC CORP0 citations33

ASAHI CHEMICAL IND

1 patent

US7425455B2Sep 16, 2008

Biosensor, magnetic molecule measurement device

ASAHI CHEMICAL IND13 citations82

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

1 patent

US6420076B1Jul 16, 2002

Method and apparatus of inspecting foreign substance on substrate surface

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD8 citations69

FUKUMOTO HIROFUMI

1 patent

US8227255B2Jul 24, 2012

Biosensor and method of assaying object

FUKUMOTO HIROFUMI0 citations30