Inventor

SIEBRAND RITSEMA ROELOF AEILKO

NL2 patents

Patents

2 patents

US10620545B2Apr 14, 2020

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV1 citations71

US8344341B2Jan 1, 2013

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations49