Inventor
KATO ERIKA
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KATO ERIKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TANAKA TETSUHIRO
3 patentsUS9048327B2Jun 2, 2015
Microcrystalline semiconductor film, method for manufacturing the same, and method for manufacturing semiconductor device
TANAKA TETSUHIRO2 citations61
US8828859B2Sep 9, 2014
Method for forming semiconductor film and method for manufacturing semiconductor device
TANAKA TETSUHIRO2 citations61
US9443989B2Sep 13, 2016
Manufacturing method of semiconductor film, manufacturing method of semiconductor device, and manufacturing method of photoelectric conversion device
TANAKA TETSUHIRO0 citations50
SEMICONDUCTOR ENERGY LAB
3 patentsUS8344378B2Jan 1, 2013
Thin film transistor and method for manufacturing the same
SEMICONDUCTOR ENERGY LAB2 citations60
US9450139B2Sep 20, 2016
Manufacturing method of semiconductor film, manufacturing method of semiconductor device, and manufacturing method of photoelectric conversion device
SEMICONDUCTOR ENERGY LAB0 citations50
US8956934B2Feb 17, 2015
Thin film transistor and method for manufacturing the same
SEMICONDUCTOR ENERGY LAB1 citations50