P

Inventor

TOMITA YASUMITSU

JP4 patents
⚠️ This page may combine multiple inventors who share the name “TOMITA YASUMITSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NGK INSULATORS LTD

3 patents
US7582184B2Sep 1, 2009

Plasma processing member

NGK INSULATORS LTD26 citations90
US7632356B2Dec 15, 2009

Gas providing member and processing device

NGK INSULATORS LTD18 citations82
US7560668B2Jul 14, 2009

Substrate processing device

NGK INSULATORS LTD8 citations82

TOMITA YASUMITSU

1 patent
US8394199B2Mar 12, 2013

Processing device

TOMITA YASUMITSU7 citations77