Inventor

WANG CHANG-GONG

US8 patents

⚠️ This page may combine multiple inventors who share the name “WANG CHANG-GONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INC

2 patents

US7795160B2Sep 14, 2010

ALD of metal silicate films

ASM INC412 citations98

US7972977B2Jul 5, 2011

ALD of metal silicate films

ASM INC7 citations83

WANG CHANG-GONG

2 patents

US9139906B2Sep 22, 2015

Doping with ALD technology

WANG CHANG-GONG5 citations69

US8563444B2Oct 22, 2013

ALD of metal silicate films

WANG CHANG-GONG0 citations48

SHERO ERIC

1 patent

US8883270B2Nov 11, 2014

Systems and methods for thin-film deposition of metal oxides using excited nitrogen—oxygen species

SHERO ERIC544 citations97

SHERO ERIC J

1 patent

US8877655B2Nov 4, 2014

Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species

SHERO ERIC J551 citations96

POMAREDE CHRISTOPHE

1 patent

US9238865B2Jan 19, 2016

Multiple vapor sources for vapor deposition

POMAREDE CHRISTOPHE9 citations79

ASM IP HOLDING BV

1 patent

US9873942B2Jan 23, 2018

Methods of vapor deposition with multiple vapor sources

ASM IP HOLDING BV3 citations72