Inventor

GRAF OTTMAR

DE4 patents

⚠️ This page may combine multiple inventors who share the name “GRAF OTTMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GRAF OTTMAR

2 patents

US7493231B2Feb 17, 2009

Process for determining the actual position of a rotation axis of a transportation mechanism

GRAF OTTMAR11 citations76

US7746482B2Jun 29, 2010

Determining the position of a semiconductor substrate on a rotation device

GRAF OTTMAR2 citations53

STEAG RTP SYSTEMS GMBH

1 patent

US7004716B2Feb 28, 2006

Device and method for aligning disk-shaped substrates

STEAG RTP SYSTEMS GMBH16 citations79

KNOPFLE DANIEL

1 patent

US9865485B2Jan 9, 2018

Apparatus and method for determining the location of plate elements of a wafer boat

KNOPFLE DANIEL1 citations38