Inventor
KUBOTA KIYOSHI
JP2 patents
Patents
2 patentsUS7880392B2Feb 1, 2011
Plasma producing method and apparatus as well as plasma processing apparatus
NISSIN ELECTRIC CO LTD5 citations60
US10932353B2Feb 23, 2021
Antenna for generating plasma, and plasma treatment device and antenna structure provided with antenna for generating plasma
NISSIN ELECTRIC CO LTD1 citations59