P

Inventor

XUE JUN

JP39 patents
⚠️ This page may combine multiple inventors who share the name “XUE JUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

14 patents
US9502258B2Nov 22, 2016

Anisotropic gap etch

APPLIED MATERIALS INC129 citations98
US9412613B2Aug 9, 2016

Development of high etch selective hardmask material by ion implantation into amorphous carbon films

APPLIED MATERIALS INC54 citations98
US9190290B2Nov 17, 2015

Halogen-free gas-phase silicon etch

APPLIED MATERIALS INC97 citations98
US9777378B2Oct 3, 2017

Advanced process flow for high quality FCVD films

APPLIED MATERIALS INC18 citations84
US9502262B2Nov 22, 2016

Nanocrystalline diamond carbon film for 3D NAND hardmask application

APPLIED MATERIALS INC5 citations84
US10096466B2Oct 9, 2018

Pulsed plasma for film deposition

APPLIED MATERIALS INC4 citations73
US9865464B2Jan 9, 2018

Nanocrystalline diamond carbon film for 3D NAND hardmask application

APPLIED MATERIALS INC2 citations73
US9852902B2Dec 26, 2017

Material deposition for high aspect ratio structures

APPLIED MATERIALS INC3 citations72
US9620407B2Apr 11, 2017

3D material modification for advanced processing

APPLIED MATERIALS INC3 citations72
US9595467B2Mar 14, 2017

Air gap formation in interconnection structure by implantation process

APPLIED MATERIALS INC0 citations52
US9534289B2Jan 3, 2017

Plasma process chambers employing distribution grids having focusing surfaces thereon enabling angled fluxes to reach a substrate, and related methods

APPLIED MATERIALS INC1 citations52
US10276369B2Apr 30, 2019

Material deposition for high aspect ratio structures

APPLIED MATERIALS INC0 citations51
US9773675B2Sep 26, 2017

3D material modification for advanced processing

APPLIED MATERIALS INC0 citations51
US9382625B2Jul 5, 2016

Remote plasma source based cyclic CVD process for nanocrystalline diamond deposition

APPLIED MATERIALS INC0 citations42

LAM RES CORP

9 patents

TENCENT TECH SHENZHEN CO LTD

6 patents

HITACHI JOHNSON CONTROLS AIR CONDITIONING INC

2 patents

HUAWEI TECH CO LTD

2 patents

SUN YOUHONG

2 patents

MATTA KHUSHI L

1 patent

JOHNSON CONTROLS HITACHI AIR CONDITIONING TECH HONG KONG LIMITED

1 patent

SHENZHEN FEIYANG PROTECH CORP LTD

1 patent

GODET LUDOVIC

1 patent