Inventor

MILENKOVIC NENA

DE2 patents

Patents

2 patents

US11560316B2Jan 24, 2023

Process and apparatus for removal of impurities from chlorosilanes

NEXWAFE GMBH0 citations50

US11519094B2Dec 6, 2022

Apparatus and method for etching one side of a semiconductor layer of a workpiece

NEXWAFE GMBH0 citations40